Superhydrophobic atmospheric pressure plasma device
Application of hydrophobic plasma to nanoimprinting
The gases and liquids such as CF4, H2, C2F6, C3F6, C4F8, CH4, C2H2, and C2H4 are used to coat the surface with plasma to make it hydrophobic. This improves the release properties with molds and prevents damage to fine patterns.
- Company：Ito Corporation
- Price：Other
